Silica particles are spherical is structure and quite accurate in size peak with a typical 3% variation of the peak size. Silica particles are monodisperse, particle size standards with NIST Traceability to NIST SRM Standards, as measured by a Brookhaven particle counter. The particle sizes are typically at 5nm increments, but we offer certain sizes that have specific references to well known Polystyrene latex sphere sizes, as well as NIST SRM calibration points of 60nm, 102nm, 269nm and 895nm. Silica particle sizes range from 40 nm (nanometers) to 2 microns (2000 nm). Silica nanoparticles at below 105nm are suspended in Ethanol to minimize particle agglomeration, while Silica particles at or greater than 105nm are suspended in deionized (DI) water. SiO2 particles are available in 15ml volumes or 100ml volumes. The refractive index of Silica particles is similar to PSL refractive index. Silica particle Refractive Index is: (n=1.46), while Polystyrene Latex (PSL refractive index is (n=1.585), both measured at 633 nm laser wavelength. With similar refractive indexes and the robust nature of silica, the SiO2 particles are quite beneficial for wafer inspection system calibration under 150 nm since the high power lasers of modern particle detection tools cause PSL spheres to shrink over a short period of time. Since the SiO2 laser response is similar to PSL laser response, the silica nanoparticles solve PSL calibration problems when using high powered laser tools. SiO2 particles do not shrink with the laser power from these more modern particle inspection tools. Visit Applied Physics for more discussion.

Applied Physics provides Silica nanoparticle size standards are also used to manufacture silica contamination wafer standards. Wafer Inspection Systems or surface scanning inspection systems (SSIS) such as KLA-Tencor SP1, KLA-Tencor SP2, KLA-Tencor SP3, KLA-Tencor SP5, KLA-Tencor SP5xp, Hitachi, Topcon and ADE wafer inspection systems can use SiO2 particles for size calibration. Sizes can be matched to your exact requirements, or you can select from our standard sizes below. Silica particles are produced as a spherical particle, grown to the desired size per each order. The silica particle size peaks are sharp and typically 3% SD or less at 105 nm and above. Most other man-made particles are not spherical, i.e, non-uniform shapes and sizes.

Silica Nanoparticles are monodisperse with a typical 3% SD from 105nm to 2 microns, and < 5% SD from 40nm to 102 nm. The particles are NIST Traceable in size using a Brookhaven laser particle counter. Particles range from 40 nm to 2000 nm for purchase. SiO2 particles can be used for calibration in wafer inspection systems, laser particle counters, TEMs and SEMs, and most laser based tools using typical higher powered laser. SIZES BELOW with (asterisk) * are diameters that are equivalent to NIST SRM sizes of 60nm, 102nm, 269nm and 895nm.

Applications Include:

  • Silica Contamination Wafer Standard
  • Laser Particle Counter calibration
  • Pharmaceutical Drug Delivery
  • Mesoporous Silica Nanoparticles (MSN)
  • Thin Film, Solar Cell Manufacturing
  • Nano-Composites
  • High Pressure, Liquid Chromatography

Silica Nanoparticles, Particle Size Standards, Benefits:

  • Repeatable, batch to batch, Silica diameters
  • Spherical particles with uniformity of size and shape
  • Typical 3% Peak Size Distribution Width from 105 nm to 2000nm
  • Typical <5% Peak Size Distribution Width from 40 nm to 102nm
  • 40 nm to 102 nm sizes available with 10% concentration mixed in 15 ml bottle, 100 ml, 500 ml and 1000 ml volumes in ethanol solution or deionized water solution
  • 105 nm to 2000 nm sizes available with 10% concentration mixed in 15 ml bottle, 100 ml, 500 ml and 1000 ml volumes in deionized water solution
  • Ultra-High Size Purity of 99.997 percent
  • Refractive Index of SiO2 (n=1.46), very close to Polystyrene Latex (n=1.585) @ 633nm laser wavelength
  • Calibration Curves between SiO2 and PSL Spheres are similar, allowing highly accurate, SiO2 size calibration
Silica Particles in Ethanol solution, 40nm, <5% SD 40nm
Silica Particles in Ethanol solution, 45nm, <5% SD 45nm
Silica Particles in Ethanol solution,, 50nm, <5% SD 50nm
Silica Particles in Ethanol solution, 60nm * , <5% SD 60nm
Silica Particles in Ethanol solution, 70nm, <5% SD 70nm
Silica Particles in Ethanol solution, 80nm, <5% SD 80nm
Silica Particles in Ethanol solution, 90nm, <5% SD 90nm
Silica Particles in Ethanol solution, 100nm, <5% SD 100nm
Silica Particles in Ethanol solution, 102nm *, <5% SD 102nm
Silica Particles in DiH2O, 125nm, 3% SD 125nm
Silica Particles in DiH2O, 130nm, 3% SD 130nm
Silica Particles in DiH2O, 140nm, 3% SD 140nm
Silica Particles in DiH2O, 150nm, 3% SD 150nm
Silica Particles in DiH2O, 155nm, 3% SD 155nm
Silica Particles in DiH2O, 160nm, 3% SD 160nm
Silica Particles in DiH2O, 170nm, 3% SD 170nm
Silica Particles in DiH2O, 180nm, 3% SD 180nm
Silica Particles in DiH2O, 190nm, 3% SD 190nm
Silica Particles in DiH2O, 200nm, 3% SD 200nm
Silica Particles in DiH2O, 225nm, 3% SD 225nm
Silica Particles in DiH2O, 250nm, 3% SD 250nm
Silica Particles in DiH2O, 269nm *, 3% SD 269nm
Silica Particles in DiH2O, 270nm, 3% SD 270nm
Silica Particles in DiH2O, 300nm, 3% SD 300nm
Silica Particles in DiH2O, 325nm, 3% SD 325nm
Silica Particles in DiH2O, 350nm, 3% SD 350nm
Silica Particles in DiH2O, 400nm, 3% SD 400nm
Silica Particles in DiH2O, 450nm, 3% SD 450nm
Silica Particles in DiH2O, 500nm, 3% SD 500nm
Silica Particles in DiH2O, 600nm, 3% SD 600nm
Silica Particles in DiH2O, 700nm, 3% SD 700nm
Silica Particles in DiH2O, 800nm, 3% SD 800nm
Silica Particles in DiH2O, 895nm *, 3% SD 895nm
Silica Particles in DiH2O, 1000nm, 3% SD 1000nm
Silica Particles in DiH2O, 1019nm, 3% SD 1019nm
Silica Particles in DiH2O, 1500nm, 3% SD 1500nm
Silica Particles in DiH2O, 2000nm, 3% SD 2000nm

Silica Nanoparticle Size Standards can be ordered in 15 ml, 100 ml, 500 ml and 1000 ml volumes at 10% concentration. Call Applied Physics at 303-999-6837 for a peak size not described above between 40nm and 2000nm. The * above represents silica spherical sizes similar to NIST SRM sizes of 60nm, 102nm, 269nm and 895nm.

silica particles